Kies de Nederlandse taal
Course module: 202100303
Advanced Micro Electro Mechanical Systems Design
Course infoSchedule
Course module202100303
Credits (ECTS)5
Course typeCourse
Language of instructionEnglish
Contact N.R. Tas
Examiner D. Alveringh
Contactperson for the course N.R. Tas
Examiner N.R. Tas
Examiner R.J. Wiegerink
Academic year2021
Starting block
Application procedureYou apply via OSIRIS Student
Registration using OSIRISYes
Aim is to advance the knowledge gained in MEMS Design in both the mechanical and electrical domains. Typically this includes deepening knowledge in electronic interfacing, impedance analysis, noise (electrical and thermos-mechanical), axial stresses and stress gradients in beams, advanced transducer science, finite element methods (comsol); all with the aim to design a MEMS based device / system on a more detailed level and closer to specifications.
Advanced MEMS Design is a 5EC add-on on MEMS Design (191211300). In Q3 a start will be made in introducing theory and operation of comsol (FEM software) and instruction will be based on solving some pre-defined problems (1.5 EC). In Q4 lectures on advanced topics such as axial stresses and stress gradients in beams, noise in (interfaced) MEMS, electronic interfacing and electro-mechanical impedance analysis will be provided and problems will be solved in connected tutorials (2 EC). Comsol is applied to optimize the design made in Q3 as part of the basic MEMS Design course (1.5 EC).

Written exam, weight 60%
Comsol report, weight 40%
Assumed previous knowledge
Mandatory: A finished Bachelor programme in one of the Technical Sciences. The course is optimized for students with a background in EE, however a background in ME, APh, AT or alike should be fine as well.
Participating study
Master Electrical Engineering
Participating study
Master Nanotechnology
Required materials
Recommended materials
M. Elwenspoek, R. Wiegerink, Mechanical Microsensors, Springer 2001, ISBN 3-540-67582-5
Instructional modes

Project supervised

Self study without assistance


Written exam, Comsol report

Kies de Nederlandse taal