Aim is to advance the knowledge gained in MEMS Design in both the mechanical and electrical domains. Typically this includes deepening knowledge in electronic interfacing, impedance analysis, noise (electrical and thermos-mechanical), axial stresses and stress gradients in beams, advanced transducer science, finite element methods (comsol); all with the aim to design a MEMS based device / system on a more detailed level and closer to specifications.
Advanced MEMS Design is a 5EC add-on on MEMS Design (191211300). In Q3 a start will be made in introducing theory and operation of comsol (FEM software) and instruction will be based on solving some pre-defined problems (1.5 EC). In Q4 lectures on advanced topics such as axial stresses and stress gradients in beams, noise in (interfaced) MEMS, electronic interfacing and electro-mechanical impedance analysis will be provided and problems will be solved in connected tutorials (2 EC). Comsol is applied to optimize the design made in Q3 as part of the basic MEMS Design course (1.5 EC).|
Written exam, weight 60%
Comsol report, weight 40%