- Design a micromechanical device or systems (sensors, actuators and fluidic devices or systems) based on a fixed fabrication process.
- Label a certain transducer in categories dealt with in the course.
- Calculate strain and stress in both axially and transversely loaded beams.
Micro electro mechanical systems design addresses the design of silicon based micromechanical and micro/nanofluidic devices and systems with an emphasis on their functionality. In the lectures different design principles are derived from the theory of elastic mechanics, transducer science and fluid mechanics and practised in exercise sessions. A major part of the course is the design lab in which the students design and test a device of their own choice which is realized in a foundry process offered by the MCS/TST group. |
Topics: Elastic mechanics of beams and membranes; actuator theory including electrostatic actuation, design of electrostatic motors; sensor transduction and read-out electronics, design of acceleration -, angular velocity -, force -, and pressure sensors; introduction in fluid mechanics for low Reynolds numbers, surface tension and capillarity, electrical double layer and elektro-osmosis; adhesion, stiction and friction in micro and nano-systems