This course will provide hands-on training in nanofabrication as well as characterization of realized nanostructures in the NanoLab cleanroom as well as at a number of research group labs.
 
Cleanroom experiments
Students will work in pairs and each group performs 3 nanolithography experiments (each experiment lasts 1 day in the cleanroom), which are listed in Table 2. The cleanroom experiments start with an introductory lecture on the fundamentals of three nanolithography techniques, i.e. electron-beam lithography (EBL), 3D lithography based on 2-photon polymerization (2PP) and displacement Talbot lithography (DTL). Subsequently, by means of these lithography techniques nanometer-sized features will be fabricated and inspected in the NanoLab cleanroom.
 
The cleanroom experiments are listed in the following table:
 
 

#	Fabrication	Characterization	Lecturers
1	electron-beam lithography (EBL)	SEM	Tiggelaar, Jenneboer
2	3D lithography based on 2-photon polymerization (2PP)	SEM	Tiggelaar, Van Vossen
3	displacement Talbot lithography (DTL)	SEM	Tiggelaar, Van Vossen

 
 
Research group experiments
Students will work in groups of 2 and each group will do 2 experiments. The two experiments one group is doing cannot be within the same category of materials: molecular or soft-matter versus solid-state.
 

#	Title	Fabrication	Characterization	Cat.	Group	Lecturer
1	F&C of self-assembled monolayers	Monolayer formation and microcontact printing	Contact angle, FT-IR, wet etching and microscopy, ellipsometry	M	MNF	Lu
2	F&C of oxide nanofibers by electrospinning	Sol-gel fabrication	Morphology: SEM structure: XPS, AFM Electro characterization	M	IMS	Van den Nieuwenhuizen
3	Sustainable vat-based 3D printing. Material properties across length scales	3D printing with bio-based resins and fillers	Quantitative AFM, optical microscopy, tensile testing	M	SPC	Gojzewski
4	F&C of thin film	Vapor deposition of films	Low energy ion scattering in vacuo	S	XUV	Sturm
5	F&C of 2D layers and single crystal surfaces	Graphene/graphite and single crystal surfaces particles	STM and spectroscopy	S	PIN	Sotthewes
6	Pickering emulsions	Emulsion stabilization	Conductivity, zeta-potential and microscopy	S	SFI	Timmerhuis
7	F&C of (sub)nanometric thin films	Physical vapor deposition	Hard x-ray reflectometry	S	XUV	Van de Kruijs

Remark
This Nanolab course is only accessible for Nanotechnology students

Assesment:
Grade: 1/3 cleanroom: 3 questionnaires and 1 report
2/3 research group: Students work in pairs of 2 and have to hand in 2 reports, grade is an average of both grades