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A physical understanding of the manufacturing and operation of key integrated circuits: CMOS, memories, image sensors.
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The major process technologies of integrated circuits are treated. The manufacturing of a diode, a transistor and a memory cell in planar technology are explained. Device isolation and (multilevel) interconnect technologies are treated. The manufacturing processes of CMOS, FLASH, DRAM and SRAM technologies and CCD and CMOS imaging circuits are covered. The focus is on the process integration of these circuits, i.e. how process steps should be combined into a complete fabrication plan. The in-depth knowledge of the microchip hardware leads to a better understanding of the design and application of microchips, e.g. through the concept of design rules. Practical assignments are carried out with Silvaco device and process simulation software.
Contents
The manufacturing technology of a variety of integrated circuits is treated, from CMOS via image sensors to memories. A physical understanding of the operation of these circuits is built up.
Assessment
Written exam (100%)
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