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Cursus: 191211440
191211440
Integrated Circuit Technology
Cursus informatie
Cursus191211440
Studiepunten (ECTS)5
CursustypeCursus
VoertaalEngels
Contactpersoonprof.dr. J. Schmitz
E-mailj.schmitz@utwente.nl
Docenten
Examinator
prof.dr. D.J. Gravesteijn
Examinator
dr.ir. C. Salm
Contactpersoon van de cursus
prof.dr. J. Schmitz
Examinator
prof.dr. J. Schmitz
Collegejaar2022
Aanvangsblok
2B
AanmeldingsprocedureZelf aanmelden via OSIRIS Student
Inschrijven via OSIRISJa
Cursusdoelen
A physical understanding of the manufacturing and operation of key integrated circuits: CMOS, memories, image sensors.
Inhoud
The major process technologies of integrated circuits are treated. The manufacturing of a diode, a transistor and a memory cell in planar technology are explained. Device isolation and (multilevel) interconnect technologies are treated. The manufacturing processes of CMOS, FLASH, DRAM and SRAM technologies and CCD and CMOS imaging circuits are covered. The focus is on the process integration of these circuits, i.e. how process steps should be combined into a complete fabrication plan. The in-depth knowledge of the microchip hardware leads to a better understanding of the design and application of microchips, e.g. through the concept of design rules. Practical assignments are carried out with Silvaco device and process simulation software.

Contents
The manufacturing technology of a variety of integrated circuits is treated, from CMOS via image sensors to memories. A physical understanding of the operation of these circuits is built up.  

Assessment
Written exam (100%)
 
Voorkennis
Technology (191210730)
Voorkennis kan worden opgedaan met
Self study
Bronnen van zelfstudie
S. Franssila, Introduction to microfabrication (2nd Edition), John Wiley and sons. ISBN: 978-0-470-74983-8
Participating study
Master Electrical Engineering
Participating study
Master Applied Physics
Participating study
Master Nanotechnology
Verplicht materiaal
-
Aanbevolen materiaal
Course material
S. Franssila, Introduction to microfabrication (2nd Edition), John Wiley and sons. ISBN: 978-0-470-74983-8
Werkvormen
Hoorcollege

Project onbegeleid

Toetsen
Written exam

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