Assumed previous knowledge
The aim is to learn how to design micro-electro-mechanical devices and systems (sensors, actuators and resonating devices or systems) based on a fixed fabrication process. The student will learn to make a conceptual design, a physical design based on relevant device physics, a mask design based on the fixed fabrication process and a design verification by device characterization.
Micro-electro-mechanical systems design addresses the systematic design of silicon-based electro-micromechanical devices and systems in a stepwise fashion. In the lectures, different design principles are derived from the theory of elastic mechanics, transducer science, resonance and practised in exercise sessions. A major part of the course is the design lab in which the students design and test a device of their own choice which is realized in a foundry process offered by the MCS/IDS group.
In the design lab, silicon-based micromechanical devices are designed in different phases, starting with conceptual design, through physical design (modelling and dimensioning), all the way to mask design.
Typical topics: Elastic mechanics of beams and membranes; actuator theory including electrostatic actuation, design of electrostatic motors; sensor transduction and read-out electronics, design of acceleration -, angular velocity -, force -, and pressure sensors; resonance and quality factor; adhesion, stiction and friction in micro and nano-systems.
In the 5 EC “MEMS Design” course the lectures are at an introductory level and mainly aim to support the design project. The lectures and project are shared with the new course “Advanced MEMS Design” (5 EC, 202100303) which offers more advanced lectures as well as an introduction to FEM for MEMS as an add-on on “MEMS Design”.
Written exam, weight 1/3, minimum grade 5.5
Project report, weight 1/3, minimum grade 5.5
Presentation, weight 1/3, minimum grade 5.5
|Mandatory: A finished Bachelor's programme in one of the Technical Sciences. The course is optimized for students with a background in EE, however a background in ME, APh, AT, or similar should be fine as well.
|Master Electrical Engineering
|M. Elwenspoek, R. Wiegerink, Mechanical Microsensors, Springer 2001, ISBN 978-3-642-08706-6.
|Self study without assistance
|Written exam, Assignment, Presentation