Kies de Nederlandse taal
Course module: 191211300
Micro Electro Mechanical Systems Design
Course info
Course module191211300
Credits (ECTS)5
Course typeCourse
Language of instructionEnglish
Contact N.R. Tas
Examiner D. Alveringh
Examiner N.R. Tas
Contactperson for the course N.R. Tas
Examiner R.J. Wiegerink
Academic year2022
Starting block
RemarksSemester course; project runs over quartiles 2A and 2B.
Application procedureYou apply via OSIRIS Student
Registration using OSIRISYes
The aim is to learn how to design micro-electro-mechanical devices and systems (sensors, actuators and resonating devices or systems) based on a fixed fabrication process. The student will learn to make a conceptual design, a physical design based on relevant device physics, a mask design based on the fixed fabrication process and a design verification by device characterization.
Micro-electro-mechanical systems design addresses the systematic design of silicon-based electro-micromechanical devices and systems in a stepwise fashion. In the lectures, different design principles are derived from the theory of elastic mechanics, transducer science, resonance and practised in exercise sessions. A major part of the course is the design lab in which the students design and test a device of their own choice which is realized in a foundry process offered by the MCS/IDS group.
In the design lab, silicon-based micromechanical devices are designed in different phases, starting with conceptual design, through physical design (modelling and dimensioning), all the way to mask design.
Typical topics: Elastic mechanics of beams and membranes; actuator theory including electrostatic actuation, design of electrostatic motors; sensor transduction and read-out electronics, design of acceleration -, angular velocity -, force -, and pressure sensors; resonance and quality factor; adhesion, stiction and friction in micro and nano-systems.

In the 5 EC “MEMS Design” course the lectures are at an introductory level and mainly aim to support the design project. The lectures and project are shared with the new course “Advanced MEMS Design” (5 EC, 202100303) which offers more advanced lectures as well as an introduction to FEM for MEMS as an add-on on “MEMS Design”.

Written exam, weight 1/3, minimum grade 5.5
Project report, weight 1/3, minimum grade 5.5
Presentation, weight 1/3, minimum grade 5.5
Assumed previous knowledge
Mandatory: A finished Bachelor's programme in one of the Technical Sciences. The course is optimized for students with a background in EE, however a background in ME, APh, AT, or similar should be fine as well.
Participating study
Master Electrical Engineering
Participating study
Master Nanotechnology
Required materials
Recommended materials
M. Elwenspoek, R. Wiegerink, Mechanical Microsensors, Springer 2001, ISBN 978-3-642-08706-6.
Instructional modes

Project supervised

Self study without assistance

Written exam, Assignment, Presentation

Kies de Nederlandse taal