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Cursus: 191211300
Micro Electro Mechanical Systems Design
Cursus informatieRooster
Studiepunten (ECTS)5
VoertaalEngels N.R. Tas
Examinator D. Alveringh
Examinator N.R. Tas
Contactpersoon van de cursus N.R. Tas
Examinator R.J. Wiegerink
AanmeldingsprocedureZelf aanmelden via OSIRIS Student
Inschrijven via OSIRISJa
The aim is to learn how to design micro-electro-mechanical or devices and systems (sensors, actuators and resonating devices or systems) based on a fixed fabrication process. The student will learn to make a conceptual design, a physical design based on relevant device physics, a mask design based on the fixed fabrication process and a design verification by device characterization.
Micro-electro-mechanical systems design addresses the systematic design of silicon based electro-micromechanical devices and systems in a step-wise fashion. In the lectures, different design principles are derived from the theory of elastic mechanics, transducer science, resonance and practised in exercise sessions. A major part of the course is the design lab in which the students design and test a device of their own choice which is realized in a foundry process offered by the MCS/IDS group.
In the design lab, silicon based micromechanical devices are designed in different phases, starting with conceptual design, through physical design (modelling and dimensioning), all the way to mask design.
Typical topics: Elastic mechanics of beams and membranes; actuator theory including electrostatic actuation, design of electrostatic motors; sensor transduction and read-out electronics, design of acceleration -, angular velocity -, force -, and pressure sensors; resonance and quality factor; adhesion, stiction and friction in micro and nano-systems.

In the 5EC “MEMS Design” course the lectures are at an introductory level and mainly aiming to support the design project. The lectures and project are shared with the new course “Advanced MEMS Design” (10 EC) which is currently under development and will offer more advanced lectures as well as an introduction to FEM for MEMS.

Written exam, weight 1/3, minimum grade 5.5
Project report, weight 1/3, minimum grade 5.5
Presentation, weight 1/3, minimum grade 5.5
Mandatory: A finished Bachelor programme in one of the Technical Sciences. The course is optimized for students with a background in EE, however a background in ME, APh, AT or alike should be fine as well.
Participating study
Master Electrical Engineering
Participating study
Master Nanotechnology
Verplicht materiaal
Aanbevolen materiaal
M. Elwenspoek, R. Wiegerink, Mechanical Microsensors, Springer 2001, ISBN 3-540-67582-5

Project begeleid

Zelfstudie geen begeleiding

Written exam, assignment, presentation

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