Aim is to learn how to design micromechanical or devices and systems (sensors, actuators and resonating devices or systems) based on a fixed fabrication process. The student will learn to make a conceptual design, a physical design based on relevant device physics, a mask design based on the fixed fabrication process and a design verification by device characterization.
Micro electro mechanical systems design addresses the design of silicon based micromechanical devices and systems with an emphasis on their functionality. In the lectures different design principles are derived from the theory of elastic mechanics, transducer science, resonance and practised in exercise sessions. A major part of the course is the design lab in which the students design and test a device of their own choice which is realized in a foundry process offered by the MCS/IDS group.|
In the design lab, silicon based micromechanical devices are designed in different phases, starting with conceptual design, through physical design (modelling and dimensioning), to mask design.
Topics: Elastic mechanics of beams and membranes; actuator theory including electrostatic actuation, design of electrostatic motors; sensor transduction and read-out electronics, design of acceleration -, angular velocity -, force -, and pressure sensors; resonance and quality factor; adhesion, stiction and friction in micro and nano-systems.